Physica E, ( ISI ), Volume (63), No (1), Year (2014-11) , Pages (151-159)

Title : ( Accurate electrostatic and van der Waals pull-in prediction for fully clamped nano/micro-beams using linear universal graphs of pull-in instability )

Authors: Masoud Tahani , Amir Reza Askari ,

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Abstract

In spite of the fact that pull-in instability of electrically actuated nano/micro-beams has been investigated by many researchers to date, no explicit formula has been presented yet which can predict pull-in voltage based on a geometrically non-linear and distributed parameter model. The objective of present paper is to introduce a simple and accurate formula to predict this value for a fully clamped electrostatically actuated nano/micro-beam. To this end, a non-linear Euler-Bernoulli beam model is employed, which accounts for the axial residual stress, geometric non-linearity of mid-plane stretching, distributed electrostatic force and the van der Waals (vdW) attraction. The non-linear boundary value governing equation of equilibrium is non-dimensionalized and solved iteratively through single-term Galerkin based reduced order model (ROM). The solutions are validated thorough direct comparison with experimental and other existing results reported in previous studies. Pull-in instability under electrical and vdW loads are also investigated using universal graphs. Based on the results of these graphs, non-dimensional pull-in and vdW parameters, which are defined in the text, vary linearly versus the other dimensionless parameters of the problem. Using this fact, some linear equations are presented to predict pull-in voltage, the maximum allowable length, the so-called detachment length, and the minimum allowable gap for a nano/micro-system. These linear equations are also reduced to a couple of universal pull-in formulas for systems with small initial gap. The accuracy of the universal pull-in formulas are also validated by comparing its results with available experimental and some previous geometric linear and closed-form findings published in the literature.

Keywords

, N/MEMS, vdW attraction, Pull-in instability, Detachment length, Universal pull-in graphs, Universal pull-in formulas.
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@article{paperid:1042166,
author = {Tahani, Masoud and Askari, Amir Reza},
title = {Accurate electrostatic and van der Waals pull-in prediction for fully clamped nano/micro-beams using linear universal graphs of pull-in instability},
journal = {Physica E},
year = {2014},
volume = {63},
number = {1},
month = {November},
issn = {1386-9477},
pages = {151--159},
numpages = {8},
keywords = {N/MEMS; vdW attraction; Pull-in instability; Detachment length; Universal pull-in graphs; Universal pull-in formulas.},
}

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%0 Journal Article
%T Accurate electrostatic and van der Waals pull-in prediction for fully clamped nano/micro-beams using linear universal graphs of pull-in instability
%A Tahani, Masoud
%A Askari, Amir Reza
%J Physica E
%@ 1386-9477
%D 2014

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