The impetus of the current study is to investigate flow and thermal field in rarefied gas flows inside a trapezoidal micro/nano cavity using the direct simulation Monte Carlo (DSMC) technique. The investigation covers the hydrodynamic properties and thermal behavior of the flow. The selected Knudsen numbers for this study are arranged in the slip and transition regimes. The results show the center of the vortex location moves by variation in the Knudsen numbers. Also, As the Knudsen number increases, the non-dimensional shear stress increases, but the distribution deviates from a symmetrical profile. The cold to hot transfer, which is in contrast with the conventional Fourier law, is observed. We show that the heat transfer is affected by the second derivative of the velocity. By increasing the Knudsen number, the transferred heat through the walls decreases, but the contraction/expansion effects on the temperature in the corner of the cavity become higher.

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