This investigation focuses on developing a new sensitivity-improving approach for high-order mode-localized mass micro-sensors by utilizing the capabilities of piezoelectric materials. To this end, an electrostatically coupled micro-beam as the building block of MEMS mass sensors is considered. The present design includes the incorporation of a patterned arrangement of piezoelectric thin films placed on the lower electrode of the system. The nonlinear reduced equations of motion for the introduced tunable system are derived by employing the Hamilton principle in conjunction with the Euler-Bernoulli beam theory and the Ritz discretization procedure. These equations are subsequently solved using the harmonic balance method. The present findings are validated by those available in the literature for the case of static excitation. In addition, the eigenvalue loci of the proposed system have been compared and verified by those obtained through three-dimensional finite element simulations carried out in COMSOL Multiphysics commercial software. Taking the shift of the amplitude ratio as the measure demonstrating the sensitivity of the proposed design, it is observed that incorporating piezoelectric excitation can significantly enhance the efficiency of these systems more than two times in comparison to conventional mode-localized mass micro-sensors without piezoelectric layers.

Keywords