In this paper, design and simulation of an IC-compatible microelectromechanical resonator for use in VHF range of a wireless communication system as a base element in integrated micromechanical resonator based oscillators and front-end filters is reported. This resonator can be implemented using thick polysilicon technology. The resonator with new design and structure reduces vibrating micromechanical series motional resistance Rx by increasing electrode-to-resonator overlap area through use of scale up of the motionless dimension of the device; while maintaining the resonant frequency. Quarter-wavelength supporting and attaching to nodal points of the resonator is required to maximize quality factor of the device. Resonant frequencies around 71 MHz, quality factor of 9912, spurious-free dynamic ranges around 92 dB and motional resistances Rx on the order of 480  were obtained by this design.

Keywords