Title : ( The effect of deposition parameters on the sensing behaviors of the SnO2: Cu nano-structure thin films including CO2-gas sensor solution preparation )
Authors: hosein rezvani , Nasser Shahtahmassebi , Mahmood Rezaee Roknabadi , Hadi Arabshahi ,
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Abstract
In this work, Cu-doped SnO2 thin films were deposited by spray pyrolysis method. The films were prepared using SnCl4,5H2O and CuCl2,2H2O hydro-alcoholic solution. Then, the sensitivity parameter of SnO2-based CO2-gas sensors is studied for various atomic percentages ([Cu]/[Sn] = 0, 2, 4, 6, 10,12.5,15, 20, 25). In addition, the effect of substrate temperature on the sensing behavior of films was also studied. The XRD and SEM structural analysis of thin film sensors confirm the nano-structure of the films with SnO2 cassiterite phase. The optical band gap of Cu doped- SnO2 films were obtained from optical absorption spectra by UV-Vis absorption spectroscopy. Measurement of the electrical resistivity of films
Keywords
, film, gas-sensors, metal-oxide, tin-oxide, nanostructure.
@article{paperid:1016996,
author = {Rezvani, Hosein and Shahtahmassebi, Nasser and Rezaee Roknabadi, Mahmood and Arabshahi, Hadi},
title = {The effect of deposition parameters on the sensing behaviors of the SnO2: Cu nano-structure thin films including CO2-gas sensor solution preparation},
journal = {Indian Journal of Science and Technology},
year = {2010},
volume = {3},
number = {6},
month = {June},
issn = {0974-6846},
pages = {627--629},
numpages = {2},
keywords = {film; gas-sensors; metal-oxide; tin-oxide; nanostructure.},
}
%0 Journal Article
%T The effect of deposition parameters on the sensing behaviors of the SnO2: Cu nano-structure thin films including CO2-gas sensor solution preparation
%A Rezvani, Hosein
%A Shahtahmassebi, Nasser
%A Rezaee Roknabadi, Mahmood
%A Arabshahi, Hadi
%J Indian Journal of Science and Technology
%@ 0974-6846
%D 2010
