In this paper, deposition, electrical, optical and structural characterizations of SnO2–ZnO transparent conducting binary–binary systems with various compositions have been investigated. Firstly, the n-type SnO2 thin films are deposited using a hydroalcoholic solution by spray pyrolysis technique. Then, certain amounts of zinc chloride (anhydrous) have been added to the initial solution, in order to prepare the SnO2–ZnO transparent conducting binary–binary system with various chemical compositions. The SnO2–ZnO polycrystalline thin films were deposited at TSs480 8C with a Zn-content wZny(SnqZn)x atomic ratio of 0–30 at.% in films. The effect of increasing Zn-content on electrical, optical and structural properties of SnO2–ZnO films has been studied. The results of X-ray diffraction and Scanning electron microscopy analysis, Hall effect experiment and resistivity measurement of films in the high Zn-concentration indicate the association of both SnO2 and ZnO phases in thin film structure. In addition, for a given Zn-content atomic ratio (20.7 at.% in film), both electrical conductivity and carrier concentration increased sharply.

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