This paper addresses utilizalion of nanoimprint lilhography for fabricalion of nanopatterned resonant photonic elemenls. These compacl periodic films resonate sharply when illuminaled with light. The al1endant speclral and angular signatures are useful in design of photonic devices lor various applications. It is of interesl to design and optimize resonant leaky-mode elements with prescribed filtering, polarization, and security al1ributes. Applying nanoimprint lithography techniques, we fabricate protolype devices using polymer materials produced by Dymax Corporation. The initial prototypes are designed for use in the near-IR and telecommunications spectral regions. We apply holographic surface-relief gratings as master templates. With these templates, we have formed submasters in PDMS (polydimethylsiloxane) to function as imprint stamps for the soft lithography steps. Using these submasters, we fabricate periodic surfaces in UV-curable polymers with resonant films depOSited on the surface by sputtering. Several example devices possessing resonance efficiencies exceeding 90% are presented along with their spectral and angular characteristics.

Keywords