Title : ( Design and modeling of some sensing and actuating mechanisms for MEMS applications )
Authors: Shahriar Kouravandbardpareh ,
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Abstract
In this paper, some types of sensing and actuating mechanisms for MEMS applications pro- posed and designed, the governing equation of models derived and solved with numerical and analytical methods. Results in a good agreement of other works and various parame- ters which affect on their operation investigated.
Keywords
Sensing Actuating Bimetal MEMS Capacitance
@article{paperid:1029177,
author = {Kouravandbardpareh, Shahriar},
title = {Design and modeling of some sensing and actuating mechanisms for MEMS applications},
journal = {Applied Mathematical Modelling},
year = {2011},
volume = {35},
number = {10},
month = {April},
issn = {0307-904X},
pages = {5173--5181},
numpages = {8},
keywords = {Sensing
Actuating
Bimetal
MEMS
Capacitance},
}
%0 Journal Article
%T Design and modeling of some sensing and actuating mechanisms for MEMS applications
%A Kouravandbardpareh, Shahriar
%J Applied Mathematical Modelling
%@ 0307-904X
%D 2011
