A comparison of antireflection surfaces based on the two-dimensional binary gratings and thin-film coatings is presented. First, a two-dimensional hybrid binary grating is proposed and analyzed by use of a vector-based implementation of the rigorous coupled-wave analysis method. The optimum parameters of the structure are determined and the effects that changing them have on spectral characteristics of the structure are studied. Then this structure is compared with multilayer thin-film antireflection filters. These filters are designed by genetic algorithm and needle methods, which are powerful methods for multilayer filter design. The comparison results show that the sensitivity of the grating to changes in the incident wavelength is high. However, a reflectance of the order of 10
3% at the design wavelength can be achieved. The sensitivity of designed antireflection thin-film filters to wavelength changes is lower, however, and the minimum achievable reflectance is higher.

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