Abstract. Undoped and ZnO: Mn thin films with different Mn content (5, 10 and 15 mol %) were grown on glass substrates by spray pyrolysis technique. X-ray diffraction analysis showed that single phase wurtzite structure is formed in all samples. XRD results also indicated that the Undoped ZnO was crystallized in c-axis oriented wurtzite structure, while the ZnO: Mn thin films were polycrystalline. The SEM results revealed that Mn presence were modified the surface morphology of the samples. The optical transmittance measurements were performed in the wavelength range from 190 to 1100nm. The refractive index, extinction coefficient and film thickness were determined by using pointwise unconstrained minimization model. It was observed that the refractive index increased from 3.20 to 3.28 eV with the increase in Mn content. The optical dispersion parameters have been calculated and analyzed by using Wemple-Di Domenico relation. The obtained values showed that dispersion energy Ed of doped samples was found to be decreasing comparing to undoped thin films.

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