Multilayer of TiO2 and TiO2:SiO2 thin films were grown on a glass substrate by sol–gel processes, followed by high temperature treatment at 500 C. The fine grained TiO2 films controlled by SiO2 dopant showed very good wear resistance and endurance life. Energy dispersive X-ray spectroscopy was used to indicate the elements in the films. X-ray diffraction analyses indicated that TiO2 and TiO2:SiO2 film contain only anatase phase. The morphologies of the original and worn surfaces of the samples were analyzed by means of scanning tunneling microscope and scanning electron microscopy. The tribological properties of TiO2 and TiO2:SiO2 thin films sliding against AISI52100 steel pin were evaluated on a pin on disk friction and wear tester. The results showed that 25-layer TiO2:SiO2 films are superior in reducing friction and resisting wear compared with the glass substrate.

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