In this study, a performance optimization process for a bimetallic micro thermal sensor using the Taguchi quality engineering method is described. Sensor performance is obtained by simulating the theoretical model, which shows the effect of the beam deflection on capacitance during changes in temperature. Optimal parameter combinations are determined using Taguchi experimental design method with at least 90 % confidence level. The level of importance of the parameters on the sensor’s sensitivity is determined using the analysis of signal-to-noise ratio as well as analysis of variance. The improvement in S/N ratio is 29.47 dB, representing an increase of 29.74 times in sensitivity.

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