Micro-electro-mechanical systems (MEMS) such as sensors and actuators are rapidly gaining popularity in a variety of industrial applications. Usually these systems are constructed by a cantilever beam or plate along with a fixed substrate. The movable beam or plate deflects due to applied voltage between the plates. Pull-in voltage and contact time are the most important characteristic of these systems. Allowing the substrate to be movable in vertical direction pull-in voltage in comparison with the fixed substrate is expected to be much smaller. In this paper the pull-in voltage and the point at which pull-in takes place for a fully clamped microplate is evaluated. The nonlinear differential equation of microplate utilizing minimum total potential energy principle is obtained. The governing equations are solved using Extended Kantorovich method and first order Galerkin approximation technique. Results revealed that in movable based MEMS pull-in voltage decreases considerably in comparison with fixed substrate while center point deflection increases when the beam is under compression inplane loads.

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