In this study, static deflection and Instability of doubleclamped nanobeams actuated by electrostatic field and intermolecular force, are investigated. The model accounts for the electric force nonlinearity of the excitation and for the fringing field effect. Effects of mid-plane stretching and axial loading are considered. Galerkin’s decomposition method is utilized to convert the nonlinear differential equation of motion to a nonlinear algebraic equation which is solved using the homotopy perturbation method. The effect of the design parameters such as axial load and mid-plane stretching on the static responses and pull-in instability is discussed. Results are in good agreement with presented in the literature.

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