This paper presents an extended kantorovich approach to simulate the static deflection of a microplates under electrostatic actuation. The model accounts for the electric force nonlinearity of the excitation. Starting from a one term Galerkin approximation and following the extended kantorovich procedure, the equations governing the microplate deflection are obtained. These equations are solved iteratively with a rapid convergence procedure to yield the desired solution. The results are validated, comparing them with other theoretical results and experimental findings, reported in the literature. It is shown that rapid convergence, high precision and independency of initial guess function makes the EKM an effective and accurate design tool for design optimization.

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