@inproceedings{paperid:1038275,
author = {جودکی, مجتبی and Heydari Z},
title = {Simulation of Phase Shifting Mask Lithography},
booktitle = {The First Iranian University Student Conference on Electrical Engineering},
year = {1998},
location = {ايران},
keywords = {Simulation of Phase Shifting Mask Lithography},
}

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%0 Conference Proceedings
%T Simulation of Phase Shifting Mask Lithography
%A جودکی, مجتبی
%A Heydari Z
%J The First Iranian University Student Conference on Electrical Engineering
%D 1998

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