In this paper stable and un-stable behavior of fully clamped rectangular micro-plates under the effect of electrostatic pressure are studied. To this end, the Kirchhoff thin plate theory is employed to derive the non-linear boundary value equation which governs on the equilibrium. The non-dimensional governing partial differential equation of equilibrium is also reduced to an algebraic equation using a simple and computationally efficient single degree of freedom (SDOF) model through the Galerkin weighted residual method. The weight function in the Galerkin procedure is also obtained by approximating the deflection field with an un-damped and linear mode-shape of an un-deformed micro-plate using the Extended Kantorovich method (EKM). The solutions are validated through direct comparison with available experimental and theoretical results in the literature.

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