In view of the difficulties arisen in determining the solutions of linear eigenvalue problems of fully-clamped rectangular micro-plates, the size-dependent pull-in analysis of such systems has not been carried out yet. Therefore, size-dependent pull-in analysis of such systems is the main goal of the present work. To this end, the size-dependent equation of equilibrium for an electrically actuated fully-clamped rectangular micro-plate based on the combination of the modified couple stress theory and the Kirchhoff plate model is utilized and solved through the computationally efficient single mode Galerkin reduced order method. The linear and un-damped mode-shapes of the system, which are obtained by the extended Kantorovich method (EKM), are employed as the weight functions in the Galerkin procedure. The findings of the present work are compared and validated against the available results in the literature and excellent agreements between them are observed. The results show that considering the effect of couple stress components increases the instability threshold of the system.

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