Pull-in instability as a congenital non-linear result continues to become increasingly a critical obstacle for the control and design of micro-structures. In the present paper, the Euler-Bernoulli beam equation, incorporating distributed electrostatic load and the effects of squeeze film-damping, coupled with the non-linear Reynolds equation for isothermal incompressible gas film is analyzed by different non-dimensional variables. Furthermore, the generalized differential quadrature (GDQ) method together with Newmark’s integration scheme is employed to solve the governing partial differential equations (PDEs) of the micro-beam. The study is conducted to focus on the effects of applied voltage and ambient pressure on dynamic pull-in instability response of a silicon micro-beam. The results obtained in this paper will provide a fundamental procedure to be efficient to the optimum design of state-of-the-art micro-devices.

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