Title : ( Nonlinear Pull-In Behavior of Deformable Micro-Electro-Mechanical Variable Loading Beam )
Authors: emran khoshrouye Ghiasi , Masoud Tahani ,
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Abstract
This paper investigates dynamic pull-in instability of MEMS incorporating squeeze film damping effects and electrostatic actuation. To this end, an Euler-Bernoulli beam model is employed within the von-Kármán geometric non-linearity. Moreover, the squeeze film damping is modeled by means of the nonlinear Reynolds equation. The non-dimensional governing equations and associated boundary conditions are solved numerically by the generalized differential quadrature method (GDQM) together with the Newton-Raphson iterative scheme. The accuracy of the present iterative approach is verified by comparing the obtained results with experimental findings available in the literature. It is demonstrated that the pressure has a dramatic impact on the pull-in instability response of the current oscillatory system. In addition, the effects of geometry and applied voltage on the pull-in time are investigated.
Keywords
, Microbeam; Electrostatic actuation; Pull, in voltage; GDQM
@inproceedings{paperid:1065836,
author = {Khoshrouye Ghiasi, Emran and Tahani, Masoud},
title = {Nonlinear Pull-In Behavior of Deformable Micro-Electro-Mechanical Variable Loading Beam},
booktitle = {7th International Conference on Acoustics and Vibration (ISAV2017)},
year = {2017},
location = {Tehran, IRAN},
keywords = {Microbeam; Electrostatic actuation; Pull-in voltage; GDQM},
}
%0 Conference Proceedings
%T Nonlinear Pull-In Behavior of Deformable Micro-Electro-Mechanical Variable Loading Beam
%A Khoshrouye Ghiasi, Emran
%A Tahani, Masoud
%J 7th International Conference on Acoustics and Vibration (ISAV2017)
%D 2017
