This research shows different hard Ti-based coatings deposited over steel substrates using the physical vapor deposition (PVD) method. The graded coating of the three produced Ti, TiN and TiCN were assessed using phase composition analysis and spectroscopy study. The microstructure characterization was studied by X-ray Photoelectron spectroscopy (XPS), Scanning Electron Microscopy (SEM), and transmission electron microscopy (TEM). The results show that integrating Ti interlayer with subsequent TiN/TICN layers can be considered a suitable way to yield hard Ti-based coating with enhanced mechanical and tribological behavior due to nitride and carbonitride phases formed from the breakdown of carbon and nitrogen atoms. The elastic modulus and hardness of all layers were identified by nanoindentation and utilized to achieve yield strength. Later, the curvature of the unloading step and elastic properties are used for finding flow behavior parameters in terms of work hardening factors (n and K). The attained findings extracted from the load-displacement curve of both nanoindentation and nano scratch were analyzed to examine the microscopic performance of all three Ti, TiN, and TiCN coatings. Scratch mechanisms analysis in all coatings shows that the main failures in samples are caused by tensile stress stemming from Hertzian cracks. However, as the force increases, the coating surface undergoes an incremental deformation, and failure mode varies to interfacial spallation.

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