Title : Design tools for a micromembrane based on a finite element method and a finite difference method simulation ( Design tools for a micromembrane based on a finite element method and a finite difference method simulation )
Authors: Mohammad Hossein Abolbashari , Mahdi Bagheri ,
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Abstract
Determination of the strain distribution is a necessary step for an accurate design of microelectromechanical systems (MEMS) devices such as micropressure sensors and microswitches. This paper deals mainly with the simulation of a silicon micromembrane under a constant pressure. Stress and strain distributions have been calculated by the finite element method (FEM) and Dynamic Relaxation (DR) method which in turn uses finite difference method (FDM). A comparison has been made between FEM and FDM results and the analytical solution. It is seen that there is a good agreement between these three approaches.
Keywords
MEMS; FEM; FDM; DR; Micromembrane
@inproceedings{paperid:199,
author = {Abolbashari, Mohammad Hossein and Bagheri, Mahdi},
title = {Design tools for a micromembrane based on a finite element method and a finite difference method simulation},
booktitle = {4th International Conference in Materials Structure and Micromechanics of Fracture, MSMF-4},
year = {2004},
location = {Brno},
keywords = {MEMS; FEM; FDM; DR; Micromembrane},
}
%0 Conference Proceedings
%T Design tools for a micromembrane based on a finite element method and a finite difference method simulation
%A Abolbashari, Mohammad Hossein
%A Bagheri, Mahdi
%J 4th International Conference in Materials Structure and Micromechanics of Fracture, MSMF-4
%D 2004
