Ultramicroscopy, ( ISI ), Volume (109), No (1), Year (2008-12) , Pages (54-60)

Title : A More Comprehensive Modeling of Atomic Force Microscope Cantilever ( A more comprehensive modeling of atomic force microscope cantilever )

Authors: Mohammad Hadi Mahdavi , Anoshirvan Farshidianfar , Masoud Tahani , خانم مهدوی , حمید دلیر ,

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Abstract

This paperfocusesonthedevelopmentofacompletemodelofanatomicforcemicroscope(AFM) micro-cantilever beam,basedonconsideringtheeffectsoffourmajorfactorsinmodelingthecantilever. They are:rotaryinertiaandsheardeformationofthebeamandmassandrotaryinertiaofthetip.A method basedondistributed-parametermodelingapproachisproposedtosolvethegoverning equations.Thecomparisonsgenerallyshowaverygoodagreementbetweenthepresentresultsandthe results ofotherinvestigators.Asexpected,rotaryinertiaandsheardeformationofthebeamdecrease resonance frequencyespeciallyathighratioofcantileverthicknesstoitslength,anditisrelativelymore pronounced forhigher-orderfrequencies,thanlowerones.Massandrotaryinertiaofthetiphave similareffectswhenthemass-ratioofthetiptothecantileverishigh.Moreover,theinfluenceofeachof these fourfactors,thicknessofthecantilever,densityofthetipandinclinationofthecantileveronthe resonance frequencieshasbeeninvestigated,separately.Itisfeltthatthisworkmighthelpthe engineersinreducingAFMmicro-cantileverdesigntime,byprovidinginsightintotheeffectsofvarious parameters withthemicro-cantilever.

Keywords

, AFM cantilever, Frequencyanalysis, Flexuralmodes, Rotaryinertiaandsheardeformationofthe, beam Mass androtaryinertiaofthetip, Exact analyticalsolution
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@article{paperid:1005695,
author = {Mahdavi, Mohammad Hadi and Farshidianfar, Anoshirvan and Tahani, Masoud and خانم مهدوی and حمید دلیر},
title = {A More Comprehensive Modeling of Atomic Force Microscope Cantilever},
journal = {Ultramicroscopy},
year = {2008},
volume = {109},
number = {1},
month = {December},
issn = {0304-3991},
pages = {54--60},
numpages = {6},
keywords = {AFM cantilever; Frequencyanalysis; Flexuralmodes; Rotaryinertiaandsheardeformationofthe; beam Mass androtaryinertiaofthetip; Exact analyticalsolution},
}

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%0 Journal Article
%T A More Comprehensive Modeling of Atomic Force Microscope Cantilever
%A Mahdavi, Mohammad Hadi
%A Farshidianfar, Anoshirvan
%A Tahani, Masoud
%A خانم مهدوی
%A حمید دلیر
%J Ultramicroscopy
%@ 0304-3991
%D 2008

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