In this research, vanadium oxide films were prepared by spray pyrolysistechnique on glass substrates. The effect of vanadium concentrationon the structural, electrical, and optical properties of samples was studied. The physical properties of these films were characterizedby using X-ray diffraction (XRD), scanning electron microscopy(SEM) analysis, Hall effect and UV–Vis absorption spectroscopy. XRD results show that the films have polycrystalline structure withtetragonal β-V2O5 and V4O9 phases and preferred orientation along 200 directions. The electrical measurements show that the lowest sheet resistance is obtained when the temperature of substrates, the concentration of vanadium, and the solution spray rate is adjusted at 450°C, 0.05M, and 10 mL min-1, respectively. The optical band gap was determined in the range of 2.36eV to 2.41 eV depending on the concentration of vanadium. The Hall effect measurements show ntype conductivity in all films and carrier concentration was obtained in the range of 1018-1016cm-3.

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