Parallel micro actuators are mostly fabricated using the wet etching process within which the presence of capillary force and the resulting pull-in instabilities can severely affect the success of the fabrication process. In the case the capillary force is large enough then the beam like structure of the micro actuators is collapsed. The current paper investigates; static behavior of microcantilevers under effect of capillary force. It is observed that with increasing the instability number defined in the paper, the deflection of the micro-cantilevers is increased. This study shows in the wet etching fabrication process, if the distance between the beam and substrate is small enough, the beam would collapse and adhere to the underneath substrate. Results of this paper can be used for successful fabrication of microbeams and failure prevention of micro- cantilevers in wet etching process.

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