In this work, a multilayered fully clamped micro-beam is modeled using commercial FEM software (COMSOL Multiphysics). The model is designed to investigate the pull-in instability of the multilayered micro-beam under the effect of electrostatic field induced by the applied DC voltage. The main advantage of this modeling is that it is correct for a large initial gap size whereas most of other theoretical models are confined to very small gap Size. It is well known that for large deflection of a beam the effect of non-linearity increases and the linear model is not valid. Finally, a single layer micro-beam is considered as a simplified multilayered micro-beam and its results are validated against previous works in the literature and it is found that they are in good agreement.

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