In this paper, problem of squeeze ¯lm damping in dual axis torsion microactuators is modeled and closed form expressions are provided for damping torques around tilting axes of the actuator. The Reynolds equation which governs the pressure distribution underneath the actuator is linearized. The resulting equation is then solved analytically. The obtained pressure distribution is used to calculate the normalized damping torques around tilting axes of the actuator. Dependence of the damping torques on the design parameters of the dual axis torsion actuator is studied. It is observed that with proper selection of the actuator's aspect ratio, damping torque along one of the tilting directions can be eliminated. It is shown that when the tilting angles of the actuator are small, squeeze ¯lm damping would act like a linear viscous damping. The results of this paper can be used for accurate dynamical modeling and control of torsion dual axis microactuators.

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