Title : ( An approach for one dimensional periodic arbitrary lithography based on Fourier series )
Authors: mahdi kordi , Seyyed Mohammad Reza Vaziri , Fahimeh Armin , Mojtaba Joodaki ,
Full TextAbstract
In interference lithography, 1-dimensional (1D) Fourier series expansion (FSE) technique can be used to create 1D periodic arbitrary patterns. Since the energy of electric field can change the solubility of photoresist, the required electric field intensity to create the desired pattern should be found. Therefore, in this article, an inequality for the magnitude of electric field on the surface of photoresist is addressed. A solution to this equation is provided with one degree of freedom. Intelligent selection of the parameters corresponding to this degree of freedom enhances the performance of the system seriously. The proposed method confirms that our approach can produce subwavelength resolutions. Based on these achievements, we present a new lithography system that can generate 1D periodic arbitrary patterns.
Keywords
, Interference lithography, Fourier series expansion, Arbitrary patterns
@article{paperid:1081505,
author = {Kordi, Mahdi and Vaziri, Seyyed Mohammad Reza and Armin, Fahimeh and Joodaki, Mojtaba},
title = {An approach for one dimensional periodic arbitrary lithography based on Fourier series},
journal = {Engineering Science and Technology, an International Journal},
year = {2020},
volume = {24},
number = {2},
month = {October},
issn = {2215-0986},
pages = {343--347},
numpages = {4},
keywords = {Interference lithography; Fourier series expansion; Arbitrary patterns},
}
%0 Journal Article
%T An approach for one dimensional periodic arbitrary lithography based on Fourier series
%A Kordi, Mahdi
%A Vaziri, Seyyed Mohammad Reza
%A Armin, Fahimeh
%A Joodaki, Mojtaba
%J Engineering Science and Technology, an International Journal
%@ 2215-0986
%D 2020
