In this paper, the high frequency analysis of a non-contact atomic force microscopy microcantilever has been discussed. In modeling and simulation of micro-cantilever in previous investigations, mass and moment of inertia of the tip has been neglected, but in our new model is considered. In an exact analytical solution, the governing equation an AFM micro-cantilever has been derived and also the effects of lateral and vertical interaction stiffness and interaction damping have been considered. The values of the first five natural frequencies for a tilted cantilever are calculated. By comparison between results of our new model and previous ones in a case study on two different conventional micro-cantilevers, the effects of mass and moment of inertia of the tip is shown to be considerable. The results show that the effects of mass and moment of inertia of the tip on the resonance frequencies are different, as effects of moment of inertia in comparison with mass could be neglected.

Keywords