Title : ( Material and Geometrical Characteristics Investigation of Micro-beam on Pull-in Voltage Using FEM and Taguchi DOE )
Authors: Arman Mohsenzadeh , Masoud Tahani , Soroosh Daqiqeh Rezaei ,
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Abstract
In this work, a fully clamped micro-beam is modeled using commercial FEM software (COMSOL Multiphysics). The model is designed to investigate the pull-in instability of the micro-beam under the effect of electrostatic field induced by the applied voltage. To this end, the device is modeled in 2-D space which has rapid calculation procedure and decreases time and cost of calculation. The micro-beam is also modeled in 3-D space which is more pursuant to the reality and its results are quite compatible with previous works in the literature. Finally effects of different characteristics of micro-beam including material and geometrical properties are investigated on pull-in voltage using Taguchi DOE.
Keywords
, Micro-beam, Pull-in voltage, COMSOL Multiphysics, FEM, Taguchi DOE
@inproceedings{paperid:1040234,
author = {Mohsenzadeh, Arman and Tahani, Masoud and Daqiqeh Rezaei, Soroosh},
title = {Material and Geometrical Characteristics Investigation of Micro-beam on Pull-in Voltage Using FEM and Taguchi DOE},
booktitle = {The First International Conference on MEMS and Microfabrication},
year = {2014},
location = {Tehran, IRAN},
keywords = {Micro-beam; Pull-in voltage; COMSOL Multiphysics; FEM; Taguchi DOE},
}
%0 Conference Proceedings
%T Material and Geometrical Characteristics Investigation of Micro-beam on Pull-in Voltage Using FEM and Taguchi DOE
%A Mohsenzadeh, Arman
%A Tahani, Masoud
%A Daqiqeh Rezaei, Soroosh
%J The First International Conference on MEMS and Microfabrication
%D 2014
